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high-voltage switchgears grids gas PURITY ANALYZER

Development of a suitcase time-of-flight mass spectrometer ...· PDF fileThe standard gas of SO 2 diluted with SF 6 (99.993% purity) at concentration of 100 ppm, and 50 ppm mixtures of SO 2, SO 2F 2 dilutedwithHe(99.9993%purity),50ppmSOF 2 diluted with He (99.9993% purity), and a pure SF 6 (99.993% purity) gas were all purchased from Dalian Special Gas Company (Dalian, China). The samples with other concentrations used

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